Greene Tweed CHEMRAZ® 629 Perfluoroelastomer

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Greene Tweed CHEMRAZ® 629 Perfluoroelastomer

Subcategory: Fluoropolymer, TS; Elastomer, TS; Thermoset

Material Notes:
Chemraz® 629 perfluoroelastomer is specifically developed by Greene Tweed to meet the rigorous demands of aggressive plasma systems. This product’s unique formulation provides enhanced plasma resistance in oxygen and fluorine plasma processes resulting in minimal contamination, less downtime and higher wafer processing yields. Chemraz 629 is developed from an advanced polymer utilizing fluoro-polymer nano-composite technology particles. Recommended for both static and dynamic dry wafer processing applications such as etch, remote plasma cleans, and deposition (CVD, HDPCVD, etc.) with challenging gland designs and reduced sealing loads. Chemraz 629 remains stable at service temperatures up to 260°C (500°F).

Applications:

Endpoint windows
Bell jar seals
Valve seals
KF fitting seals
Window seals
Isolator valve seals
Lid seals
Gas inlet seals
Slit valve seals
Chamber seals

Information provided by Green Tweed

Available Properties

Specific Gravity
Hardness, Shore A
Tensile Strength @ Break
Elongation at Break
Tensile Modulus
Compression Set
Maximum Service Temperature, Air
Minimum Service Temperature, Air
Color

Property Data

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