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Greene Tweed CHEMRAZ® 644 Perfluoroelastomer

 

Subcategory: Fluoropolymer, TS; Elastomer, TS; Thermoset

Material Notes:
Specifically developed to meet the demands of aggressive dry plasma systems and the corresponding remote O2 cleaning processes, Chemraz® 644, a perfluoroelastomer with a unique formulation, provides enhanced plasma resistance and minimal contamination resulting in less downtime and higher wafer processing yields. Recommended primarily for both static and dynamic oxide etch wafer processing applications, Chemraz 644 remains stable at service temperatures up to 315°C (600°F).

Applications:

  • Endpoint windows
  • Bell jar seals
  • Valve seals
  • KF fitting seals
  • Window seals
  • Isolator valve seals
  • Lid seals
  • Gas inlet seals
  • Slit valves seals
  • Chamber seals

Information provided by Green Tweed

Available Properties
  • Specific Gravity
  • Hardness, Shore A
  • Tensile Strength @ Break
  • Elongation at Break
  • Tensile Modulus
  • Compression Set
  • Maximum Service Temperature, Air
  • Minimum Service Temperature, Air
  • Color
  
Property Data

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