Greene Tweed CHEMRAZ® 661 Perfluoroelastomer
Subcategory: Fluoropolymer, TS; Elastomer, TS; Thermoset
Material Notes: Chemraz® 661 perfluoroelastomer is specifically developed by Greene Tweed to meet the unique demands of aggressive plasma systems. This product’s unique formulation provides enhanced plasma resistance and reduced contamination resulting in less downtime and lower cost of ownership. Chemraz 661 is recommended for both static and dynamic dry wafer processing applications such as etch and CVD. Chemraz 661 remains stable at service temperatures up to 240°C (464°F).Applications: - Window seals
- Bell jar seals
- Valve seals
- KF fitting seals
- Isolator valve seals
- Lid seals
- Gas inlet seals
- Slit valve seals
Information provided by Green Tweed
Available Properties |
- Specific Gravity
- Hardness, Shore A
- Tensile Strength @ Break
- Elongation at Break
- Tensile Modulus
- Compression Set
- Maximum Service Temperature, Air
- Minimum Service Temperature, Air
- Color
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Property Data |
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