Precision Polymer Engineering Perlast® G67P Translucent Perfluoroelastomer

Subcategory: Fluoropolymer, TS; Elastomer, TS; Thermoset

Key Words: Rubbers

Material Notes:
A translucent beige compound with semi-crystalline perfluoropolymer nano-filler, specially developed to meet the demands of the semiconductor and bio-analytical industries. Compatible with fluorine based chemistries and universally suitable for both wet and dry semiconductor processes including Lithography, Plasma, PVD, CVD, Etch, Stripping and Cleaning. Perlast® G67P combines a fully fluorinated polymer backbone, a fully fluorinated nano-filler system (no inorganic fillers) and a highly fluorinated cross-linking process, which results in a perfluoroelastomer with unrivalled purity and chemical resistance. Perlast® G67P has a significantly lower compressive modulus than traditional perfluoroelastomers, making it highly compliant. So for a given compression, it exhibits a low reaction force, this results in lower stress on the seal, which leads to longer life expectancy.

Applications: Dynamic seals: gate valves; door seals; pendulum valves; ISO valves; bonded gates and lip seals. Static seals: O-rings; body seals; chamber lid seals; cathode assembly seals; electro-static-chuck seals; flange fittings. Wafer-handling products: end effector pads; vacuum suction pads. Wet and dry semiconductor processes: lithography; plasma; PVD; CVD; etch; stripping; cleaning. Laser/optical equipment.